Národní úložiště šedé literatury Nalezeno 2 záznamů.  Hledání trvalo 0.01 vteřin. 
Detection of closure of chamber doors for an electron scanning microscope
Obšitník, Michal ; Drexler, Petr (oponent) ; Nešpor, Dušan (vedoucí práce)
The aim of this work is to design a suitable sensor for the detection of the chamber door position in an electron scanning microscope when the pressure in the vacuum chamber is changed and a control program is assembled to the selected sensor. The detected motion is within one millimeter. In the first part, the work is aimed at getting acquainted with the principle of functioning of the electron scanning microscope and with the basic types of sensors for position and mechanical force detection. Subsequently, the sensors are compared according to three basic categories: price, range, and resistance to external influences. Selected theory-based sensors are tested to exclude inappropriate sensors from use. After testing, the Interlink FSR-402 resistance sensor is selected. The scheme is connected to the sensor and the operation control program is created. The result of this work is a force sensing sensor, which is triggered by the pressure of chamber door on the chamber wall when creating a vacuum and a control program that controls the results measured from the sensor and adjusts them as required.
Detection of closure of chamber doors for an electron scanning microscope
Obšitník, Michal ; Drexler, Petr (oponent) ; Nešpor, Dušan (vedoucí práce)
The aim of this work is to design a suitable sensor for the detection of the chamber door position in an electron scanning microscope when the pressure in the vacuum chamber is changed and a control program is assembled to the selected sensor. The detected motion is within one millimeter. In the first part, the work is aimed at getting acquainted with the principle of functioning of the electron scanning microscope and with the basic types of sensors for position and mechanical force detection. Subsequently, the sensors are compared according to three basic categories: price, range, and resistance to external influences. Selected theory-based sensors are tested to exclude inappropriate sensors from use. After testing, the Interlink FSR-402 resistance sensor is selected. The scheme is connected to the sensor and the operation control program is created. The result of this work is a force sensing sensor, which is triggered by the pressure of chamber door on the chamber wall when creating a vacuum and a control program that controls the results measured from the sensor and adjusts them as required.

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